Design and Implementation of Electrically Tunable Filter on Thin-Films Enabled Engineered Substrate
To miniaturize communication systems, great efforts have been spent on developing tunable RF passives. Fully electrically miniaturized tunable RF passives have been implemented with the integration of both ferromagnetic and ferroelectric thin films directly into the individual specific design. A strategy to improve the ferromagnetic resonance frequency (FMR) of Permalloy to over 6GHz and an electrically tuning method of equivalent permeability for Permalloy with DC magnetic field generated by applied DC current have been developed. A novel engineered substrate implemented with embedded multi-layer Permalloy and lead zirconate titonate (PZT) thin film patterns has been recently investigated and proposed, the substrate has high and DC current tunable permeability and DC voltage tunable permittivity. Miniaturized frequency agile arbitrary RF components could be developed with the proposed electrically tunable engineered substrate combined with state-of-the-art RF design techniques. In this research, it is planned to combine the above two techniques to design, fabricate, and test an electrically tunable filter with the goal of optimizing the resonator structure and the engineered substrate to improve tuning range and performance.